Analysis of defects in an electric and photonic double-layer substrate made by separation-by-implanted-oxygen three-dimensional sculpting
17th Nov 2006, 02:41 GMT
Koichiro Kishima With a view to application to electric-device fabrication, the authors investigated a separation-by-implanted-oxygen (SIMOX) three-dimensional (3D) sculpting method [P. Koonath et al., Appl. Phys. Lett. [bold 83], 4909 (2003)] that will integrate in three dimensions electric circuits and photonic ci ... [Appl. Phys. Lett. 89, 201109 (2006)] published Thu Nov 16, 2006.
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